JPH0470749U - - Google Patents
Info
- Publication number
- JPH0470749U JPH0470749U JP11416890U JP11416890U JPH0470749U JP H0470749 U JPH0470749 U JP H0470749U JP 11416890 U JP11416890 U JP 11416890U JP 11416890 U JP11416890 U JP 11416890U JP H0470749 U JPH0470749 U JP H0470749U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- lid plate
- semiconductor wafer
- closed
- stepped portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11416890U JPH0470749U (en]) | 1990-10-30 | 1990-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11416890U JPH0470749U (en]) | 1990-10-30 | 1990-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0470749U true JPH0470749U (en]) | 1992-06-23 |
Family
ID=31861831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11416890U Pending JPH0470749U (en]) | 1990-10-30 | 1990-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0470749U (en]) |
-
1990
- 1990-10-30 JP JP11416890U patent/JPH0470749U/ja active Pending
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